Solid-state imaging element having image signal overflow path

ABSTRACT

Since the great number of elements constituting a unit pixel having an amplification function would hinder reduction of pixel size, unit pixel n,m arranged in a matrix form is comprised of a photodiode, a transfer switch for transferring charges stored in the photodiode, a floating diffusion for storing charges transferred by the transfer switch, a reset switch for resetting the floating diffusion, and an amplifying transistor for outputting a signal in accordance with the potential of the floating diffusion to a vertical signal line, and by affording vertical selection pulse φVn to the drain of the reset switch to control a reset potential thereof, pixels are selected in units of rows.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a solid-state imaging element, a methodfor driving it, and a camera system, and particularly to anamplification type solid-state imaging element such as a CMOS imagesensor having an amplification function for each of unit pixels arrangedin a matrix form, a method for driving it, and a camera system usingamplification type solid-state imaging elements as imaging devices.

2. Description of Related Art

Amplification type solid-state imaging elements, for example, CMOS imagesensors have various pixel structures. As an example, there is known apixel structure having floating diffusion (FD) inside pixels. This pixelstructure is advantageous in that sensitivity can be increased becausesignals are amplified by the floating diffusion. FIG. 18 shows a priorart pixel structure of this type.

In FIG. 18, each of unit pixels 100 arranged in a matrix form includesphotogate 101, transfer switch 102, floating diffusion 103, resettransistor 104, amplifying transistor 105, and vertical selectiontransistor 106. In response to a vertical selection pulse afforded viathe vertical selection line 111, the vertical selection transistor 106selects unit pixels 100 in units of rows, whereby a signal amplified bythe amplifying transistor 105 is output to the vertical signal line 112.

By the way, to reduce pixel size requires that the number of elements toconstitute a unit pixel 100 is reduced. However, since the pixelstructure of a prior art CMOS image sensor described above dictates thatthree transistors, reset transistor 104, amplifying transistor 105, andvertical selection transistor 106, are used to select the potential offloating diffusion 103 in units of rows for output to vertical signalline 112, a large number of elements are used, hindering reduction ofpixel size.

SUMMARY OF THE INVENTION

The present invention has been made in consideration of the aboveproblem and an object of the present invention is to reduce the numberof elements making up a unit pixel and offer a solid-state imagingelement having made reduction of pixel size possible, a method fordriving it, and a camera system.

A solid-state imaging element according to the present inventioncomprises:

unit pixels, arranged in a matrix form, which have photoelectrictransfer elements, transfer switches for transferring charges stored inthe photoelectric transfer elements, charge store parts for storingcharges transferred by the transfer switches, reset switches forresetting the charge store parts, and amplifying elements for outputtingsignals in accordance with the potential of the charge store parts tovertical signal lines;

a vertical scanning circuit for selecting pixels in units of rows bycontrolling a reset potential afforded to the reset switch;

a horizontal scanning circuit for sequentially selecting signals outputto the vertical signal lines in units of columns; and

an output circuit for outputting signals selected by the horizontalscanning circuit via horizontal signal lines.

In a solid-state imaging element of the above configuration, by settinga reset potential afforded to a reset switch in a unit pixel to, e.g., 0V at the time of other than pixel selection, the potential of a chargestore part becomes Low. By affording, e.g., a pixel source voltage tothe reset switch as a reset potential, pixels are selected, and upon theoccurrence of a reset pulse, the potential of the charge store part isreset to the pixel source voltage. Namely, by controlling a resetpotential, the potential of the charge store part is controlled.Subsequently, signal charges stored in the photoelectric transferelement are transferred to the charge store part and the potential ofthe charge store part that changes in accordance with the transfer isread into a vertical signal line by an amplifying element.

A method for driving a solid-state imaging element according to thepresent invention, in a solid-state imaging element comprising unitpixels, arranged in a matrix form, which have photoelectric transferelements, transfer switches for transferring charges stored in thephotoelectric transfer elements, charge store parts for storing chargestransferred by the transfer switches, reset switches for resetting thecharge store parts, and amplifying elements for outputting signals inaccordance with the potential of the charge store parts to verticalsignal lines, selects pixels in units of rows by controlling a resetpotential afforded to the reset switches.

In a solid-state imaging element having an amplification function foreach pixel, the potential of a charge store part is controlled bycontrolling a reset potential afforded to a reset switch to reset thecharge store part. Thereby, pixels are selected in units of rows withoutproviding an element for vertical (row) selection. That is, the resetswitch also has a function to select pixels in unit of rows.Accordingly, an element for vertical selection can be cut from a unitpixel.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic configuration diagram showing a first embodimentof the present invention.

FIG. 2 is a potential diagram of unit pixel and vertical signal line inthe first embodiment.

FIG. 3 is a timing chart at pixel selection in the first embodiment.

FIGS. 4A to 4C show a potential diagram 1 of pixels of selection line inthe first embodiment.

FIGS. 5A to 5C show a potential diagram 2 of pixels of selection line inthe first embodiment.

FIGS. 6A to 6E are cross-sectional structure diagrams showing a concreteconfiguration example of overflow path.

FIG. 7 is a schematic configuration diagram showing a variant of thefirst embodiment of the present invention.

FIG. 8 is a potential diagram of unit pixel and vertical signal line inof a variant of the first embodiment.

FIG. 9 is a timing chart at pixel selection in a variant of the firstembodiment.

FIG. 10 is a schematic configuration diagram showing a second embodimentof the present invention.

FIG. 11 is a potential diagram of unit pixel and vertical signal line inthe second embodiment.

FIG. 12 is a timing chart at pixel selection in the second embodiment.

FIGS. 13A to 13D show a potential diagram 1 of pixels of selection linein the second embodiment.

FIGS. 14A to 14C show a potential diagram 2 of pixels of selection linein the second embodiment.

FIGS. 15A to 15D show a potential diagram 1 of pixels of non-selectionline in the second embodiment.

FIGS. 16A to 16C show a potential diagram 2 of pixels of non-selectionline in the second embodiment

FIG. 17 is a schematic configuration diagram of an example of a camerasystem to which the present invention is applied.

FIG. 18 is a circuit diagram showing the configuration of a prior artunit pixel.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter, embodiments of the present invention will be described withreference to the accompanying drawings.

FIG. 1 is a schematic configuration diagram of a CMOS image sensoraccording to a first embodiment of the present invention. In FIG. 1,unit pixels 10 are two-dimensionally arranged to constitute a pixelsection; for simplicity, there are shown here only two pixels, unitpixel 10 n,m in the n-th row, the m-th column and unit pixel 10 n+1,m inthe (n+1)-th row, the m-th column. The structure of unit pixel 10 is thesame for all pixels; hereinafter, as an example, the structure of unitpixel 10 n,m in the n-th row, the m-th column will be described.

The unit pixel 10 n,m comprises a photoelectric transfer element, e.g.,photodiode 11, transfer switch 12, floating diffusion (FD) 13 serving asa charge store part, reset switch 14, and amplifying transistor 15. As aphotoelectric transfer element, photogate or embedded photodiode can besubstituted for the photodiode 11.

In this example, N-channel enhancement type transistor, N-channeldepression type transistor, and N-channel enhancement type transistorare used as the transfer switch 12, reset switch 14, and amplifyingtransistor 15, respectively. However, all or part of these transistorscan also be replaced by P-channel transistors to constitute the circuit.

In the unit pixel 10 n,m, the photodiode 11 is a p-n junction diode thatphotoelectrically converts incident light into signal charge of quantityin accordance with the quantity of the incident light and stores it. Thetransfer switch 12, connected between the photodiode 11 and floatingdiffusion 13, transfers the signal charge stored in the photodiode 11 tothe floating diffusion 13. The floating diffusion 13 converts thetransferred signal charge into a signal voltage and affords the voltageto the gate of the amplifying transistor 15.

The reset switch 14, connected between the floating diffusion 13 andvertical selection line 21, has a function to reset the potential of thefloating diffusion 13 to that of pixel power source. The amplifyingtransistor 15, connected between power source line 22 and verticalsignal line 23, amplifies the potential of the floating diffusion 13 andoutputs the amplified potential to the vertical signal line 23. A pixelpower source voltage is not limited to 3.3V, which is used as an examplein this example.

FIG. 2 shows a potential distribution of unit pixel 10 and verticalsignal line 23 in the first embodiment. In the figure, PD, TS, FD, RS,and AT designate photodiode 11, transfer switch 12, floating diffusion13, reset switch 14, and amplifying transistor 15, respectively. Forpotentials of the floating diffusion 13 and amplifying transistor 15, apotential operation range at selection and a potential operation rangeat other times are shown by solid lines and dashed lines, respectively.

Vertical scanning circuit 24, provided to select unit pixels 10 in unitsof rows, is comprised of e.g., a shift register. From the verticalscanning circuit 24, vertical selection pulse φV ( . . . , φVn, φVn+1, .. . ), transfer pulse φT ( . . . , φTn, φTn+1, . . . ), and reset pulseφR ( . . . , φRn, φRn+1, . . . ) are output.

The vertical selection pulse φV ( . . . , φVn, φVn+1, . . . ) is appliedto the drain of reset switch 14 through the vertical selection line 21,the transfer pulse φT ( . . . , φTn, φTn+1, . . . ) to the gate oftransfer switch 12 through the transfer line 25, and the reset pulse φR( . . . , φRn, φRn+1, . . . ) to the gate of reset switch 14 through thereset line 26.

To the end of vertical signal line 23, vertical signal line outputcircuit 27 is connected for each column. As the vertical signal lineoutput circuit 27, an output circuit of e.g., voltage mode type is used.Horizontal selection pulse φH ( . . . , φHm, . . . ) from horizontalscanning circuit 28 is fed to the vertical signal line output circuit27. The horizontal scanning circuit 28, provided to select unit pixels10 in units of columns, is comprised of e.g., a shift register.

The output end of vertical signal line output circuit 27 is connected tohorizontal signal line 29. To the horizontal signal line 29, one line ofsignals read into the vertical signal line output circuit 27 through thevertical signal line 23 from unit pixel 10 is output sequentially fromthe vertical signal line output circuit 27 by horizontal scanning of thehorizontal scanning circuit 28. The input end of horizontal signal lineoutput circuit 30 is connected to the end of horizontal signal line 29.

Next, the pixel operation in a CMOS image sensor according to the firstembodiment of the above configuration will be described using an exampleof selecting pixels of n-th line (n-th row). Herein, the timing chart ofFIG. 3 will be used with reference to the potential diagrams of FIGS. 4and 5.

A time period (t<t1) until time t1 is non-selection state. In thenon-selection state, since vertical selection pulse φVn is in Low level(0 V) and reset switch (RS) 14 is in off state, the potential offloating diffusion (FD) 13 is 0 V.

At time t1, the vertical selection pulse φVn changes from Low to High(3.3V), and at the same time, in response to the occurrence of resetpulse φRn, the reset switch 14 goes on and the potential of floatingdiffusion 13 of the n-th line is reset from 0 V to 3.3V. As a result,since the amplifying transistor (AT) 15 is turned on, pixels of the n-thline go into selection state (t1<t<t2).

Upon the extinction of the reset pulse φRn at time t2, the resetfloating diffusion 13 is read. Consequently, an offset level(hereinafter, called a noise level) different for each different pixelis read into the vertical signal line 23 by the amplifying transistor 15and output to the vertical signal line output circuit 27 (t2<t<t3). Theread-out noise level is held (sample held) within the vertical signalline output circuit 27.

Upon the occurrence of transfer pulse φTn at time t3, the transferswitch (TS) 12, because a potential below the gate thereof is deepenedby the transfer pulse φTn applied to the gate, transfers signal chargestored in the photodiode (PD) 11 to the floating diffusion 13 (t3<t<t4).The transfer of signal charge causes the potential of the floatingdiffusion 13 to change in accordance with the quantity of charge.

Upon the extinction of the transfer pulse φTn at time t4, a potential inaccordance with the signal charge of the floating diffusion 13 is readinto the vertical signal line 23 by the amplifying transistor 15 andoutput to the vertical signal line output circuit 27 (t4<t<t5). Theread-out signal level is held (sample held) within the vertical signalline output circuit 27.

Upon entry to a horizontal valid period, signals read from pixels 10into the vertical signal line output circuit 27 for each column aresequentially output to the horizontal signal line output circuit 30through the horizontal signal line 29. At this time, in these outputcircuits 27 and 30, by subtracting a noise level from the signal levelof unit pixel 10, a fixed pattern noise due to the dispersion ofcharacteristics of unit pixel 10 is suppressed and a fixed pattern noisedue to the dispersion of characteristics of the vertical signal lineoutput circuit 27 is suppressed.

At time t6, the vertical selection pulse φVn changes from High to Low,and thereby pixels on the n-th line go into non-selection state, and atthe same time, pixels on the next (n+1)-th line go into selection state,and the above operation is repeated on the (n+1)-th line.

Herein, a description will be made of pixels on non-selection lines. Bydriving the vertical selection pulse φV Low (0 V), pixel 10 can be putin non-selection state. This is because since a depression typetransistor is used as the reset switch 14, when the vertical selectionpulse φV is 0 V, the floating diffusion 13 is always 0 V, and therebythe amplifying transistor 15 is always in cut-off state.

As described above, unit pixel 10 is comprised of photodiode 11,transfer switch 12, floating diffusion 13, reset switch 14, andamplifying transistor 15, and the potential of floating diffusion 13 iscontrolled through the reset switch 14, whereby one transistor can becut because a vertical selection switch is not provided to provide thevertical selection function, as it would be in the case of conventionalpixel structures.

When the vertical selection pulse φV is driven Low by incorporating acharge pump circuit, the gate of the transfer switch 12 can be put at anegative potential for a long period other than the period t3<t<t4. Insuch a case, a dark current can be suppressed since holes can beimplanted into the silicon interface of the transfer switch adjacent tothe photodiode 11 for a long period of time. This produces a greateffect, particularly when an embedded sensor structure is employed asthe photodiode 11.

Although the foregoing description of operation, for simplicity, hasbeen on all pixel independent reading mode in which signals of pixels ofall lines are independently read, the present invention is not limitedto that mode. Of course, frame reading mode and field reading mode arealso possible. In the former mode, signals of odd (even) lines are readin a first field and signals of even (odd) lines are read in a secondfield. In the latter mode, signals of two adjacent lines are read at thesame time to add voltages, and combinations of two lines for theaddition operation are changed on a field basis.

Herein, a description will be made of a concrete configuration of unitpixel 10. When signal charges are stored in the photodiode 11, asapparent from FIG. 4A, the floating diffusion 13 becomes 0 V. For thisreason, during the charge storing, the surface potential of the transferswitch 12 must be 0 V or less. However, without a special process, therewould be no path for discharging charges that overflow from thephotodiode 11.

Accordingly, a pixel structure according to the present invention ismade so that a diffusion layer connected to power source, e.g., thedrain of the amplifying transistor 15 is laid out adjacently to thephotodiode 11 and element separation between both is made imperfect,whereby an overflow path is formed and excess charges are discharged(overflowed) via the path. By this process, an overflow path can beformed without increasing the dimension of unit pixel 10.

As concrete examples of forming an overflow path, various structuresdescribed below are possible. As shown in FIGS. 6A to 6E, there are astructure (FIG. 6A) in which an overflow path is formed by reducing thewidth (distance) of an element separation region; a structure (FIG. 6B)in which an overflow path is formed by reducing the density of a Pregion for channel stop; and a structure (FIG. 6C) in which an overflowpath is formed by positively forming an N⁻ region below a P region forchannel stop.

In the case where an embedded sensor structure is used as the photodiode11, there are a structure (FIG. 6D) in which an N⁺(SR N⁺) region forsensor is formed also in the pixel power source side to moderately forma lateral distance of an overflow path and further a high-densityimpurity is injected into the N⁺ region of the pixel power source sideto form a N⁺ region for source/drain; and a structure (FIG. 6E) in whichan N⁺ region is formed for an overflow path in the (FIG. 6D) structure.

A LOCOS (Local Oxidation of Silicon) oxide film shown in each of thestructures of FIGS. 6A to 6C is not necessarily necessary. However, inthis case, to moderately form a lateral distance of an overflow path, asin the example of the (FIG. 6D) structure, it is desirable to implantions to an N⁺ region of photodiode 11 and an N⁺ region of pixel powersource adjacent to an overflow pulse with an identical mask.

As in each of the structures of FIG. 6A, and FIGS. 6C to 6E, the siliconinterface of overflow section is not depleted by forming the overflowpath with a virtual gate. Accordingly, dark current occurs lessfrequently, compared with prior art overflow structures in which atransfer gate is used, in which case a silicon interface would bedepleted. A greater effect is obtained particularly when an embeddedsensor structure is used as the photodiode 11, because depleted portionsof silicon interface can be completely eliminated.

FIG. 7 is a schematic configuration diagram of a variant of a firstembodiment of the present invention. The first embodiment takes aconfiguration in which signals from pixels are output in voltage mode,while the variant takes a configuration in which signals from pixels areoutput in current mode. Accordingly, the pixel structure of unit pixelis exactly the same as that of the first embodiment, except for theconfiguration of a signal output system.

A CMOS image sensor according to the variant takes a configuration inwhich horizontal selection switch 31 is connected between the end ofvertical signal line 23 and horizontal signal line 29, and anoperational amplifier 33 fed back by resistor 32 is placed at the end ofhorizontal signal line 29. That is, to output signals from pixels incurrent mode, the vertical signal line 23 and horizontal signal line 29are fixed to a constant potential (Vbias) by the operational amplifier33 fed back by the resistor 32 and the amplifying transistor 15 withinunit pixel 10 n,m is linearly operated by incorporating a power sourcecircuit 34, for example, and reducing a source voltage to be afforded topixels.

Although this variant is constructed in a way that incorporates thepower source circuit 34 and reduces a source voltage to be afforded topixels, the present invention is not limited to this construction. Forexample, by reducing a threshold voltage Vth of the amplifyingtransistor 15 within unit pixel 10 n,m, the amplifying transistor 15 canalso be linearly operated.

FIG. 8 shows a potential distribution of unit pixel 10 and verticalsignal line 23 in this variant. In FIG. 8, PD, TS, FD, RS, and ATdesignate photodiode 11, transfer switch 12, floating diffusion 13,reset switch 14, and amplifying transistor 15, respectively. Forpotentials of the floating diffusion 13 and amplifying transistor 15, apotential operation range at selection and a potential operation rangeat other times are shown by solid lines and dashed lines, respectively.

FIG. 9 is a timing chart for explaining the operation of a CMOS imagesensor according to this variant. Fundamental portions of the operationof unit pixel 10 n,m are the same as those of the first embodiment.Herein, to avoid an overlapping description, only different portionswill be described.

Signals are read from pixels during a horizontal valid period. Noiselevels are not read but only signal levels are read. Since a sample holdoperation cannot be performed in a signal output system in the currentmode as it could be in the voltage mode, fixed pattern noises of signallevels due to the characteristics of pixels are suppressed using a framememory in an external signal processing system.

Although FIG. 9 is a timing chart on the all pixel independent readingmode in which signals of pixels of all lines are independently read, thepresent invention is not limited to that mode. Of course, the framereading mode and the field reading mode are also possible. In the formermode, signals of odd (even) lines are read in a first field and signalsof even (odd) lines are read in a second field. In the latter mode,signals of two adjacent lines are read at the same time to add currents,and combinations of two lines for the addition operation are changed ona field basis.

FIG. 10 is a schematic configuration diagram of a CMOS image sensoraccording to a second embodiment of the present invention. In FIG. 10,unit pixels 40 are two-dimensionally arranged to constitute a pixelsection; for simplicity, there are shown here only two pixels, unitpixel 40 n,m in the n-th row, the m-th column and unit pixel 40 n+1,m inthe (n+1)-th row, the m-th column. The structure of unit pixel 40 is thesame for all pixels; hereinafter, as an example, the structure of unitpixel 40 n,m in the n-th row, the m-th column will be described.

The unit pixel 40 n,m comprises a photoelectric transfer element, e.g.,photodiode 41, transfer switch 42, floating diffusion (FD) 43 serving asa charge store part, reset switch 44, amplifying transistor 45, andtransfer selection switch 46. As a photoelectric transfer element,photogate or embedded photodiode can be substituted for the photodiode41.

In this example, N-channel enhancement type transistor, N-channeldepression type transistor, N-channel enhancement type transistor, andN-channel enhancement type transistor are used as transfer switch 42,reset switch 44, amplifying transistor 45, and transfer selection switch45, respectively. However, all or part of these transistors can also bereplaced by P-channel transistors to constitute the circuit.

In the unit pixel 40 n,m, the photodiode 41 is a p-n junction diode ofe.g., an embedded sensor structure that photoelectrically convertsincident light into signal charge of quantity in accordance with thequantity of the incident light and stores it. The transfer switch 42,connected between the photodiode 41 and floating diffusion 43, transfersthe signal charge stored in the photodiode 41 to the floating diffusion43. The floating diffusion 43 converts the transferred signal chargeinto a signal voltage and feeds the voltage to the gate of theamplifying transistor 45.

The reset switch 44, connected between the floating diffusion 43 andvertical selection line 51, has a function to reset the potential of thefloating diffusion 43 to that of pixel power source. The amplifyingtransistor 45, connected between power source line 52 and verticalsignal line 53, amplifies the potential of the floating diffusion 43 andoutputs the amplified potential to the vertical signal line 53.

To the power source line 52, a voltage of e.g., 3.3 V is afforded frompower source circuit 54. However, a source voltage is not limited to 3.3V. Transfer selection switch 46, connected between transfer line 55 andtransfer switch 42, performs transfer control for the transfer switch42.

FIG. 11 shows a potential distribution of unit pixel 40 and verticalsignal line 53 in the second embodiment. In FIG. 11, PD, TS, FD, RS, AT,and SS designate photodiode 41, transfer switch 42, floating diffusion43, reset switch 44, amplifying transistor 45, and transfer selectionswitch 46, respectively. For potentials of the floating diffusion 43 andamplifying transistor 45, a potential operation range at selection and apotential operation range at other times are shown by solid lines anddashed lines, respectively.

As apparent from FIG. 11, in this example, a photodiode of an embeddedsensor structure is used as photodiode 41. That is, the photodiode is ofsuch a sensor construction that P⁺ hole store layer 47 is provided onthe substrate surface of the p-n junction diode. For an overflow path ofunit pixel 40, the pixel structures in FIGS. 6A to 6E are employed, asin the first embodiment.

Vertical scanning circuit 56, provided to select unit pixels 40 in unitsof rows, is comprised of e.g., a shift register. From the verticalscanning circuit 56, vertical selection pulse φV ( . . . , φVn, φVn+1, .. . ) is output. Vertical selection pulse φV ( . . . , φVn, φVn+1, . . .) is applied to the drain of reset switch 14 via the vertical selectionline 51.

Vertical scanning circuit 57, provided to select unit pixels 40 in unitsof columns, is comprised of e.g., a shift register. From the horizontalscanning circuit 57, reset pulse φR ( . . . , φRm, . . . ), transferpulse φT ( . . . , φTm, . . . ), and horizontal selection pulse φH ( . .. , φHm, . . . ) are output. The transfer pulse φT ( . . . , φTm, . . .) is applied to the drain of transfer selection switch 46 via thetransfer line 55, and the reset pulse φR ( . . . , φRm, . . . ) to thegate of reset switch 44 via the reset line 58.

Horizontal selection switch 60 is connected between the end of verticalsignal line 53 and horizontal signal line 59. As the horizontalselection transistor 60, an N-channel transistor, for example, is used.Horizontal selection pulse φH ( . . . , φHm, . . . ) output fromhorizontal scanning circuit 57 is fed to the gate of the horizontalselection transistor 60. An operational amplifier 62 fed back byresistor 61 is placed at the end of horizontal signal line 59.

A CMOS image sensor according to the second embodiment of the aboveconfiguration takes a configuration in which signals from pixels areoutput in the current mode. That is, the vertical signal line 53 andhorizontal signal line 59 are fixed to a constant potential (Vbias) bythe operational amplifier 62 fed back by the resistor 61 and theamplifying transistor 45 within unit pixel 40 n,m is linearly operatedby incorporating a power source circuit 54 and reducing a source voltageto be afforded to pixels.

Although this embodiment is configured so that the amplifying transistor45 is linearly operated by incorporating the power source circuit 54 andreducing a source voltage to be afforded to pixels, the presentinvention is not limited to this configuration. For example, by reducinga threshold voltage Vth of the amplifying transistor 45 within unitpixel 40 n,m, the amplifying transistor 45 can be linearly operated.

Next, the pixel operation in a CMOS image sensor according to the secondembodiment of the above configuration will be described using an exampleof selecting pixels of n-th line. Herein, the timing chart of FIG. 12will be used with reference to the potential diagrams of FIGS. 13 and14.

A time period (t<t1) until time t1 is non-selection state. In thenon-selection state, since vertical selection pulse φVn is in Low level(0 V) and reset switch (RS) 44 is in off state, the potential offloating diffusion (FD) 43 is 0 V.

At time t1, the vertical selection pulse φVn changes from Low to High(3.3V). The gate potential of the amplifying transistor (AT) 45increases because a depression type transistor is used as the resettransistor 44 (t1<t<t2).

At this time, the amplifying transistor 45 may comes on depending on thepotential setting thereof or the potential of the vertical signal line53. This example assumes that the amplifying transistor 45 is cut off.At this point, however, since the horizontal selection switch 60 is offand no influence is exerted on the horizontal signal line 59, it doesnot matter in which state the amplifying transistor 45 is.

In response to the occurrence of reset pulse φRm at time t2, the resetswitch 44 comes on and the potential of floating diffusion 43 in then-th line, the m-th column is reset from 0 V to 3.3 V. Since thisresults in the amplifying transistor (AT) 45 turning on, unit pixel 40n,m in the n-th line, the m-th column goes into the selection state(t2<t<t3).

Upon the extinction of the reset pulse φRm at time t3, the resetfloating diffusion 43 is read. Consequently, an offset level(hereinafter, called a noise level) different for each pixel is readinto the vertical signal line 53 (t3<t<t4). The read-out noise level is,in response to the horizontal selection pulse φHm that occurred at timet2, output to the horizontal signal line 59 by the horizontal selectionswitch 60 that is on.

Upon the occurrence of transfer pulse φTm at time t4, the transferswitch (TS) 42, because a potential below the gate thereof is deepenedby the transfer pulse φTn applied to the gate, transfers signal chargestored in the photodiode (PD) 41 to the floating diffusion 43 (t4<t<t5).The transfer of the signal charge causes the potential of the floatingdiffusion 43 to change in accordance with the quantity of charge.

Upon the extinction of the transfer pulse φTm at time t5, a potential inaccordance with the signal charge of the floating diffusion 43 is readinto the vertical signal line 53 by the amplifying transistor 45(t5<t<t6). The read-out noise level is output to the horizontal signalline 59 by the horizontal selection switch 60.

At time t7, the vertical selection pulse φVn changes from High to Low,whereby pixels on the n-th line go into non-selection state, and at thesame time, pixels on the next (n+1)-th line go into selection state, andthe above operation is repeated on the (n+1)-th line.

As described above, for one pixel, noise level and signal level aresequentially obtained in that order (a reverse order from signal levelto noise level is also permissible). This operation is called a pixelpoint sequential reset operation.

The pixel point sequential reset operation has the following advantages:

{circle around (1)} Since noise output and signal output take anidentical path including the horizontal selection switch 60, a fixedpattern noise due to dispersion between paths will not occur inprinciple.{circle around (2)} Since noise level and signal level are sequentiallyoutput, the difference between noise level and signal level can beobtained by a differential circuit such as a correlated duplex samplingcircuit (CDS circuit) without using frame memory and line memory in anexternal signal processing system, so that the system can be simplified.

A series of pixel point sequential reset operations described above mustbe performed at a high speed. For this reason, signals from pixels areoutput in the current mode that is advantageous in terms of operationspeed. However, without being limited to a mode of current mode output,if speed requirements are satisfied, a mode of voltage mode output canalso be taken, as in a CMOS image sensor according to the firstembodiment.

As apparent from the potential diagrams of FIGS. 15 and 16, theoperation of pixels not selected does not matter particularly even iftransfer pulse φTm and reset pulse φRm are shared in column direction.

Although the foregoing description of operation, for simplicity, is onthe all pixel independent reading mode in which signals of pixels of alllines are independently read, the present invention is not limited tothat mode. Of course, frame reading mode and field reading mode are alsopossible. In the former mode, signals of odd (even) lines are read in afirst field and signals of even (odd) lines are read in a second field.In the latter mode, signals of two adjacent lines are read at the sametime to add currents, and combinations of two lines for the additionoperation are changed on a field basis.

In the CMOS image sensor according to the above second embodiment,adjacent φTm−1 and reset pulse φRm can be also be shared, and therebythe wiring can be cut.

By positively providing capacity to a node connected to the gate oftransfer selection switch 46 and the gate of transfer switch 42, whenvertical selection pulse φVn changes from High to Low when t>t7, thegate potential of the transfer switch 42 can be made negative. By thisarrangement, since holes can be implanted into the silicon interface oftransfer switch 42 adjacent to the photodiode 41, a dark current can besuppressed.

Furthermore, the power source circuit 54 can be cut by shifting (in thisexample, e.g., 1.5 V shift) the potential (Vbias) of vertical signalline 53, the potential of amplifying transistor 45, and the entiresource voltage.

A variant of the second embodiment can be constructed so that currentoutput is performed by transferring the role of the amplifyingtransistor 45 as source follower resistance load to the horizontalselection switch 60. That is, a current output operation is performed asdescribed below.

Assume that the horizontal selection switch 60 operates in a lineararea. The potential of horizontal signal line 59 is held constant, forexample, by using an operational amplifier 33 fed back by a resistor. Bydoing so, a source follower loaded with a resistor is formed by theamplifying transistor 46 and the horizontal selection switch 60, acurrent flows through the horizontal signal line 59 in accordance withthe potential of floating diffusion 43, and a voltage in accordance withthe potential of floating diffusion 43 develops at the output end of theoperational amplifier.

FIG. 17 is a schematic configuration diagram of an example of a camerasystem to which the present invention is applied. In FIG. 17, incidentlight (image light) from an object (not shown) forms an image on theimaging surface of imaging element 72 by an optical system includinglens 71 and other elements. As the imaging element 72, a CMOS imagesensor according to the foregoing first embodiment or variant thereof,or the second embodiment is used.

The imaging element 72 is driven based on a variety of timings outputfrom driving circuit 73 including a timing generator and the like. Animaging signal output from the imaging element 72 is subjected tovarious signal operations in signal processing circuit 74 before beingoutput as an image signal.

As described above, according to the present invention, unit pixelsarranged in a matrix form are comprised of a photoelectric transferelement, a transfer switch, a charge store part, a reset switch, and anamplifying element, and pixels are selected in units of rows bycontrolling a reset potential afforded to the reset switch, whereby anelement for vertical selection can be cut, making reduction of pixelsize possible.

1-15. (canceled)
 16. An imaging device comprising: a plurality ofpixels, at least one of the pixels including a photoelectric conversionelement, a charge store element, a reset transistor configured toconnect a first voltage line to the charge store element according to areset pulse supplied via a reset line, and an amplifying transistorconfigured to connect a second voltage line to a signal line accordingto a potential of the charge store element, wherein an oxide film isarranged between the photoelectric conversion element and a contactregion, the contact region being electrically connected to the secondvoltage line.
 17. The imaging device according to claim 16, wherein theone of the pixels further includes a transfer transistor configured toconnect the photoelectric conversion element to the charge store elementaccording to a transfer pulse supplied via a transfer line.
 18. Theimaging device according to claim 16, wherein a region in which theoxide film arranged is configured to discharge charges from thephotoelectric conversion element to the second voltage line.
 19. Theimaging device according to claim 16, wherein the first voltage line isconfigured to supply a first voltage and a second voltage.
 20. Theimaging device according to claim 16, wherein a potential of the firstvoltage line is not fixed.
 21. The imaging device according to claim 16,wherein the amplifying transistor is directly connected to the signalline.
 22. The imaging device according to claim 16, wherein the chargestore element is a floating diffusion region.
 23. The imaging deviceaccording to claim 16, wherein the reset transistor is configured toreset the charge store element.
 24. The imaging device according toclaim 16, wherein the photoelectric conversion element is configured toconvert incident light into a signal charge.
 25. The imaging deviceaccording to claim 16, wherein the signal line extends along a firstdirection, and wherein the first voltage line, the second voltage line,and the reset line extend along a second direction which is differentwith the first direction.
 26. The imaging device according to claim 16,further comprising a vertical scanning circuit and a horizontal scanningcircuit.
 27. The imaging device according to claim 26, furthercomprising an output circuit configured to output image signals suppliedfrom the plurality of pixels according to the horizontal scanningcircuit.
 28. The imaging device according to claim 16, wherein the resettransistor is a depression type transistor.
 29. The imaging deviceaccording to claim 17, wherein a negative potential is applied to thecontrol terminal of the transfer transistor.
 30. An electronic apparatuscomprising the imaging device according to claim
 16. 31. An imagingdevice comprising: a plurality of pixels, at least one of the pixelsincluding a photoelectric conversion element, a reset transistorconfigured to reset a potential of the photoelectric conversion element,and an amplifying transistor configured to output signals according to apotential of the photoelectric conversion element to a signal line,wherein the amplifying transistor is applied a voltage, and wherein anoxide film is arranged between said photoelectric conversion element anda contact region, the contact region applied the voltage.
 32. Theimaging device according to claim 31, wherein the one of the pixelsfurther includes a transfer transistor configured to transfer chargesfrom the photoelectric conversion element to a charge store element. 33.The imaging device according to claim 31, wherein a region in which theoxide film arranged is configured to discharge charges from thephotoelectric conversion element.
 34. The imaging device according toclaim 31, wherein the reset transistor is configured to be applied afirst voltage and a second voltage.
 35. The imaging device according toclaim 31, wherein the amplifying transistor is directly connected to thesignal line.
 36. The imaging device according to claim 32, wherein thecharge store element is a floating diffusion region.
 37. The imagingdevice according to claim 32, wherein the reset transistor is configuredto reset the charge store element.
 38. The imaging device according toclaim 31, wherein the photoelectric conversion element is configured toconvert incident light into a signal charge.
 39. The imaging deviceaccording to claim 31, further comprising a vertical scanning circuitand a horizontal scanning circuit.
 40. The imaging device according toclaim 39, further comprising an output circuit configured to outputimage signals supplied from the plurality of pixels according to thehorizontal scanning circuit.
 41. The imaging device according to claim31, wherein the reset transistor is a depression type transistor. 42.The imaging device according to claim 32, wherein a negative potentialis applied to the control terminal of the transfer transistor.
 43. Anelectronic apparatus comprising the imaging device according to claim31.